Open Access BASE2004
QSAR Tools in Environmental Analysis for the Semiconductor Industry
Abstract
Semiconductor manufacturing and process design is driven to change rapidly by technology demands and competition. Incorporating environmental considerations into this process requires decision tools which will generate environmental analyses in as short a turn-around as possible. The predictive capability of QSAR methods are investigated and U.S. government QSAR software tools are surveyed for their applicability to environmental decision analysis in semiconductor equipment design.
Sprachen
Englisch
Verlag
eScholarship, University of California
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