Article(electronic)December 2022

Highly sensitive and robust 3C-SiC/Si pressure sensor with stress amplification structure

In: Materials and design, Volume 224, p. 111297

Tong, Braiden; Nguyen, Tuan-Hung; Nguyen, Hong-Quan; Nguyen, Tuan-Khoa; Nguyen, Thanh; Dinh, Toan; Vo Ke Thanh, Ngo; Huu Ly, Truong; Chi Cuong, Nguyen; Ba Cuong, Hoang; Xuan Thang, Trinh; Thanh Dau, Van; Viet Dao, Dzung

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Languages

English

Publisher

Elsevier BV

ISSN: 1873-4197

DOI

10.1016/j.matdes.2022.111297

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