Epitaxial Growth of CaMnO3-y Films on LaAlO3 (112 over bar 0) by Pulsed Direct Current Reactive Magnetron Sputtering
CaMnO3 is a perovskite with attractive magnetic and thermoelectric properties. CaMnO3 films are usually grown by pulsed laser deposition or radio frequency magnetron sputtering from ceramic targets. Herein, epitaxial growth of CaMnO3-y (002) films on a (112 over bar 0)-oriented LaAlO3 substrate using pulsed direct current reactive magnetron sputtering is demonstrated, which is more suitable for industrial scale depositions. The CaMnO3-y shows growth with a small in-plane tilt of Funding Agencies|Swedish Research Council (VR)Swedish Research Council [2016-03365]; Knut and Alice Wallenberg Foundation through the Wallenberg Academy Fellows program [KAW 2020.0196]; Electron Microscopy Laboratory at Linkoping University; Swedish Government Strategic Research Area in Materials Science on Functional Materials at Linkoping University (Faculty Grant SFO-Mat-LiU) [2009 00971]; Swedish Energy AgencySwedish Energy AgencyMaterials & Energy Research Center (MERC) [46519-1]; Swedish Foundation for Strategic Research (SSF)Swedish Foundation for Strategic Research [RIF 14-0074]