Open Access#11971
RF sputtering of quartz
In: http://hdl.handle.net/2027/mdp.39015095215219
"Monsanto Research Corporation a subsidiary of Monsanto Company"--Cover. ; "Issued: December 15, 1971." ; "MLM-1850; TID-4500 ; UC-4." ; Includes bibliographic references (page 6) ; Mound Laboratory, Miamisburg, Ohio, operated for United States Atomic Energy Commission, U.S. Government Contract no. ; Mode of access: Internet.