Optical-Based Thickness Measurement of MoO3 Nanosheets
10 pags., 5 figs. -- This article belongs to the Special Issue 2D Materials and Heterostructures with Application in Optoelectronics ; Considering that two-dimensional (2D) molybdenum trioxide has acquired more attention in the last few years, it is relevant to speed up thickness identification of this material. We provide two fast and non-destructive methods to evaluate the thickness of MoO3 flakes on SiO2/Si substrates. First, by means of quantitative analysis of the apparent color of the flakes in optical microscopy images, one can make a first approximation of the thickness with an uncertainty of 3 nm. The second method is based on the fit of optical contrast spectra, acquired with micro-reflectance measurements, to a Fresnel law-based model that provides an accurate measurement of the flake thickness with +-2 nm of uncertainty. ; This project has received funding from the European Research Council (ERC) under the European Union's Horizon 2020 research and innovation programme (grant agreement n◦ 755655, ERC-StG 2017 project 2D-TOPSENSE), the European Commission, under the Graphene Flagship (Core 3, grant number 881603), the Spanish Ministry of Economy, Industry and Competitiveness through the grant MAT2017-87134-C2-2-R and partially funded by the Spanish Ministerio de Ciencia e Innovación through grant RTI2018-096498-B-I00 (MCIU/AEI/FEDER, UE). SP acknowledges the fellowship PRE2018-084818.