Aufsatz(elektronisch)#12019
Mechanical and tribological properties of 100-nm thick alumina films prepared by atomic layer deposition on Si(100) substrates
In: Proceedings of the Estonian Academy of Sciences, Band 68, Heft 2, S. 126
ISSN: 1736-7530
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In: Proceedings of the Estonian Academy of Sciences, Band 68, Heft 2, S. 126
ISSN: 1736-7530
In: Proceedings of the Estonian Academy of Sciences, Band 70, Heft 2, S. 163
ISSN: 1736-7530
In: Proceedings of the Estonian Academy of Sciences: official publication of Tallinn Technical University and the Estonian Academy of Sciences = Eesti Teaduste Akadeemia toimetised = Izvestija Akademii Nauk Ėstonii. Engineering = tehnikateadused = techničeskie nauki, Band 12, Heft 4, S. 419
In: Proceedings of the Estonian Academy of Sciences, Band 70, Heft 3, S. 215
ISSN: 1736-7530
In: Proceedings of the Estonian Academy of Sciences, Band 71, Heft 2, S. 186
ISSN: 1736-7530