Article(electronic)2003

Atomic layer deposition of ZnO thin films and dot structures

In: Proceedings of the Estonian Academy of Sciences. Physics, mathematics, Volume 52, Issue 3, p. 277

Łusakowska, E; Szczerbakow, A; Phillips, M R; Kopalko, K; Goldys, E M; Godlewski, M M; Godlewski, M; Butcher, K A

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Languages

English

Publisher

Estonian Academy Publishers

DOI

10.3176/phys.math.2003.3.04

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